Abstract:Diamond films and carbon nanotubes can both be synthesized by microwave-plasma enhanced chemical vapor deposition (MECVD) technology. When mixture of methane, nitrogen and hydrogen is used to generate the discharge, either diamond or graphite phase, or both can be formed on the substrate. Using optical emission spectra (OES), we have found a strong correlation between the type of active species (CN and CH) and the phase of growth on the substrate. In particular, in the case of carbon nanotube growth, intensity ratio of CN and C2 radicals was found to be closely related with morphology, microstructure and graphitization degree of the samples prepared at different CH4/N2 ratio. Carbon nanotubes show well aligned from SEM picture at about 20% CH4 ratio, longer in length and denser in distribution indicate high growth rate. "Nanobell" structure from TEM results is polymerized when nitrogen dominates in the mixing gas and the length and thickness of the nanobells varied with the CH4 ratio. Raman spectra show better graphitization of sample at low CH4 ratio and more amorphous structures form when CH4 ratio increase. Relative concentration of CN to C2 radicals benefits to the alignment of nanotubes and is disadvantageous to the graphitization of samples. However, in the case of diamond growth, as indicated by optical emission spectra, CH radicals play key role in the diamond phase formation process. The effect of these radicals in plasma to the formation of diamond and graphite phase is briefly discussed.

Simulation of gas phase chemistry in C-H-O and C-H-N systems for chemical vapor deposition diamond films

Construction and Analysis of C–H–N Phase Diagram for Diamond Chemical Vapor Deposition by Simulation of Gas-Phase Chemistry

Deposition conditions for CVD diamond films under low pressure with nitrogen addition

Nitrogen overgrowth as a catalytic mechanism during diamond chemical vapour deposition

A Kinetic Model for the Initial Growth of Diamond Films

Effect of CN and CH radicals on diamond and carbon nanotubes growth in MECVD

Projective Phase Diagrams for CVD Diamond Growth from C–H and C–H–O Systems

Phase diagrams in C-H-N system for low pressure CVD diamond growth

Thermodynamic Analysis for Chemical Vapor Deposition Diamond with the Participation of Chlorine

High nitrogen amounts incorporated diamond films deposited by the addition of nitrogen in a hot-filament CVD system

THE NUCLEATION AND GROWTH OF (100) TEXTURED DIAMOND FILMS IN PRESENCE OF NITROG EN

Phase diagram calculation of diamondgrowth from low pressure gases

The influence of nitrogen and oxygen on the high nucleation density diamond growth

Monte Carlo Simulation of Electron Velocity Distribution and Gas Phase Process in Electron-Assisted Chemical Vapor Deposition

Utilization Of Non-Equilibrium Stationary Phase Diagrams In C-H-N Systems Diamond Deposition

Thin Film Growth Conditions for Cvd Diamond under Low Pressure

Phase Diagrams for Cvd Diamond Deposition from Halogen-Containing Gas Phase

A Theoretical Study on Dopants Substituted on the H-terminated Surface Regulating the Threshold Concentration of Nitrogen for Accelerating Diamond Growth

Simulation of Carbon Deposition Conditions in a Methane or Acetylene Flame Based on Mechanisms of Chemical Transport Reaction

Analysis Of Optical Emission Spectroscopy In Diamond Chemical Vapor Deposition