A MEMS mid-infrared thermal source for NDIR gas analyzers

Xinming Ji,FeiDie Wu,Haifen Xie,Zhou Jia,Zongming Bao,Yiping Huang
DOI: https://doi.org/10.1109/ICSICT.2004.1435167
2004-01-01
Abstract:A mid-IR thermal source, based on electrical heating of a platinum film, has been studied. The IR source, with effectively emitting area diameters of 1.6 mm, is obtained from heated platinum thin film resistors deposited on a Si3N4/SiO2 membrane. The IR source can emit wideband infrared light with a peak wavelength of λ=2.62 μm at 1106 K and be adapted to direct modulation with variable voltage. Appropriate heat transfer makes it possible to reach a modulation frequency as high as 50 Hz. Such specifications meet the requirements of the various IR gas sensors and can be regarded as a new thermal IR sources to be used in NDIR (non-dispersive infrared) gas analyzers.
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