MEMS Thermal-induced Pulsed Infrared Light Sources

WU Fei-die,JI Xin-ming,WANG Jian-ye,ZHOU Jia,HUANG Yi-ping,BAO Zong-ming,BAO Min-hang
2006-01-01
Abstract:Different structures and patterns of MEMS infrared light sources are obtained from heated platinum films. The characteristic is described and compared. The emission spectrum is relatively strong in the wavelength of 2-4 μm excited at appropriate electric power. Reasonable good modulation can be obtained at 20 Hz and higher. Such specifications meet the requirements of various IR gas sensors.
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