The Research of MEMS Infrared Radiation Source Characteristics Based on Surface Plasmon Resonance Effect

WANG Guo-xun,JI Xin-ming,ZHOU Jia,BAO Zong-ming,BAO Min-hang,HUANG Yi-ping
DOI: https://doi.org/10.3969/j.issn.1004-1699.2008.08.012
2008-01-01
Abstract:In this work,a tunable narrow-band infrared emitters based on the surface plasmon resonance(SPR)technology is reported and the relation between reflection spectrum of infrared light emitters and structure of metallized-surface 2D photonic crystal has been studied.The emitters are structured by Si-SiO2(650 nm)-Cr(100 nm)-Au(800 nm).Eight structures with different lattice constant a,diameter of holes D,D/a and the symmetry of the hole array are designed and fabricated.The effect of different parameters including a,D and D/a has been studied.The wavelength of reflection peak and strength of reflection peak of the emitters are characterized by infrared light reflection spectrum.The experimental data has been compared and analyzed with simulation results from finite-difference time-domain(FDTD)calculation.It is found that the peak wavelength was proportional to the lattice constant.For emitters with same lattice constant,the larger the ratio,the stronger the reflection.The emitters with hexagonal array among three different symmetries of hole array,has the best reflection spectrum.
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