The Reseach of MEMS Infrared Radiation Source Characteristics Based on Two-Dimensional Metallic Sub-Wavelength Hole Arrays

YAO Xiang,XIAO Gongli,JI Xinming,ZHOU Jia,BAO Zongming,HUANG Yiping
DOI: https://doi.org/10.3969/j.issn.1004-1699.2010.11.007
2010-01-01
Abstract:In this work,a novel tunable narrow-band infrared emitter based on two-dimensional metallic sub-wavelength hole arrays is reported and the relationship between the transmission spectrum of the emitter and the thickness of SU-8 layer of metal/dielectric/metal(M/D/M)structure in mid-infrared waveband has been studied.The emitter is structured by Au/SU-8/Au,in which the thickness of Au layer is 20 nm,and the SU-8 layer is between 0.2 to 1.2 micron.The transmission spectrum has been tested out with Varian 4 100 FT-IR.The experimental data have been compared and analyzed with simulation results from finite-difference time-domain(FDTD)calculation.It is found out that the structure with SU-8 layer thinner than 1 micron has much larger transmission peak strength than the ones with thicker SU-8 layer,with the largest transmission peak strength found when the thickness of SU-8 layer is 360 nm,and the red-shift of the wavelength of the transmission peak is also observed.
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