Abstract:Mid-infrared (MIR) spectroscopy is a powerful technique employed for a variety of applications, including gas sensing, industrial inspection, astronomy, surveillance, and imaging. Thin-film narrowband interference filters, targeted to specific absorption bands of target molecules, are commonly deployed for cost-effective MIR sensing systems. These devices require complex and time-consuming fabrication processes. Also, their customization on the micro-scale for emerging miniaturized applications is challenging. Plasmonic nanostructure arrays operating in reflection and transmission modes have been developed for MIR. However, they experience undesirable characteristics, such as broad spectra and low reflection/transmission efficiencies. All-dielectric metasurfaces have low intrinsic losses and have emerged as a substitute for plasmonic metasurfaces in MIR spectroscopy. Nevertheless, they typically operate only in reflection mode. In this work, we present a hybrid metal-dielectric metasurface for MIR spectroscopy operating in transmission mode. The metasurface is composed of germanium (Ge) atop aluminum (Al) cylinders, and we show that the transmission response arises because of the hybridization of modes arising from the Ge and the Al structures. The presented metasurface has a high transmission efficiency of 80 % at $\lambda = 2.6\ \mu\text{m}$, and a narrow full-width-at-half-maximum of $0.4\ \mu\text{m}$. We show numerical simulations, successful fabrication using a straightforward fabrication method, and deployment as the in-line optical filter in a CO$_2$ gas detection with a limit of detection of ~0.04% (a few hundred ppm). Our work demonstrates the potential for hybrid metasurfaces as in-line gas sensing optical filters in MIR spectroscopy.

Dual-band spatially-distinguishable metasurface thermal emitter for filterless mid-infrared gas sensing

Magnetic polariton-based thermal emitter for dual-band filterless gas sensing

Large-area Dual-Band Hybrid Metagrating Thermal Emitter for Gas Detection

Tunable Narrowband Mid-Infrared Thermal Emitter with a Bilayer Cavity Enhanced Tamm Plasmon.

High-sensitivity multi-gas detection using dual-ridge metasurface emitters with polarization-distinguishable emission spectra

Ultra-narrow bandwidth mid-infrared thermal emitters achieved with all-dielectric metasurfaces

Tunable narrowband and diffuse metasurface thermal emitters based on doped semiconductors

Non-polarized and Ultra-Narrow Band Filter in MIR Based on Multilayer Metasurface

Simultaneous Single-Peak and Narrowband Thermal Emission Enabled by Hybrid Metal-Polar Dielectric Structures

High-Transmission Mid-Infrared Bandpass Filters Using Hybrid Metal-Dielectric Metasurfaces for CO2 Sensing

Dual-Band Infrared Metamaterial Perfect Absorber For Narrow-Band Thermal Emitters

Inverse Design of Refractory Mid-Wave Infrared Narrowband Thermal Emitters for Optical Gas Sensing

Suspended Microracetrack Resonator with Lateral Sub-wavelength-Grating Metamaterial Cladding for Mid-infrared Sensing Applications

Tunable Dual-Band Thermal Emitter Consisting of Single-Sized Phase-Changing GST Nanodisks

Dual-band Perfect Absorber for a Mid-Infrared Photodetector Based on a Dielectric Metal Metasurface

Selective Mid-IR Metamaterial-Based Gas Sensor System: Proof of Concept and Performances Tests

Mid-Infrared Sensor Based on a Suspended Microracetrack Resonator With Lateral Subwavelength-Grating Metamaterial Cladding

Multifunctional Metasurfaces for Multispectral Infrared Detection With Radiative Cooling

Ultra-Narrow Band Mid-Infrared Perfect Absorber Based on Hybrid Dielectric Metasurface.

Near-field resonant photon sorting applied: dual-band metasurface quantum well infrared photodetectors for gas sensing

Spectrally Tunable Nanocomposite Metamaterials As Near-Perfect Emitters for Mid-Infrared Thermal Radiation Management