Mid-Infrared Sensor Based on a Suspended Microracetrack Resonator With Lateral Subwavelength-Grating Metamaterial Cladding

Zecen Zhang,Geok Ing Ng,Ting Hu,Haodong Qiu,Xin Guo,Wanjun Wang,Mohamed Said Rouifed,Chongyang Liu,Jiaxu Sia,Jin Zhou,Callum G. Littlejohns,Graham T. Reed,Hong Wang
DOI: https://doi.org/10.1109/JPHOT.2018.2809662
IF: 2.4
2018-01-01
IEEE Photonics Journal
Abstract:A mid-infrared (MIR) biochemical sensor based on a one-time Si etching suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding is theoretically and experimentally demonstrated on a commercial 340-nm-thick-top-silicon silicon-on-insulator platform. The suspended structure offers an increased interaction area between the mode field and the chemicals under investig...
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