High-Transmission Mid-Infrared Bandpass Filters Using Hybrid Metal-Dielectric Metasurfaces for CO2 Sensing

Amr Soliman,C Williams,Richard Hopper,Florin Udrea,Haider Butt,Timothy D. Wilkinson

DOI: https://doi.org/10.48550/arXiv.2409.05071

2024-09-08

Abstract:Mid-infrared (MIR) spectroscopy is a powerful technique employed for a variety of applications, including gas sensing, industrial inspection, astronomy, surveillance, and imaging. Thin-film narrowband interference filters, targeted to specific absorption bands of target molecules, are commonly deployed for cost-effective MIR sensing systems. These devices require complex and time-consuming fabrication processes. Also, their customization on the micro-scale for emerging miniaturized applications is challenging. Plasmonic nanostructure arrays operating in reflection and transmission modes have been developed for MIR. However, they experience undesirable characteristics, such as broad spectra and low reflection/transmission efficiencies. All-dielectric metasurfaces have low intrinsic losses and have emerged as a substitute for plasmonic metasurfaces in MIR spectroscopy. Nevertheless, they typically operate only in reflection mode. In this work, we present a hybrid metal-dielectric metasurface for MIR spectroscopy operating in transmission mode. The metasurface is composed of germanium (Ge) atop aluminum (Al) cylinders, and we show that the transmission response arises because of the hybridization of modes arising from the Ge and the Al structures. The presented metasurface has a high transmission efficiency of 80 % at $\lambda = 2.6\ \mu\text{m}$, and a narrow full-width-at-half-maximum of $0.4\ \mu\text{m}$. We show numerical simulations, successful fabrication using a straightforward fabrication method, and deployment as the in-line optical filter in a CO$_2$ gas detection with a limit of detection of ~0.04% (a few hundred ppm). Our work demonstrates the potential for hybrid metasurfaces as in-line gas sensing optical filters in MIR spectroscopy.

Optics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to achieve the design and fabrication of efficient, narrow - bandwidth gas - sensing filters in the mid - infrared (MIR) spectral range. Specifically, the paper proposes a design based on hybrid metal - dielectric metasurfaces for CO₂ gas detection. This design aims to overcome several key challenges in existing technologies:

1. **Limitations of traditional thin - film interference filters**: Although traditional thin - layer narrow - band interference filters are cost - effective, their micro - scale customization and miniaturization applications are relatively difficult, and the manufacturing process is complex and time - consuming.

2. **Problems with plasmonic nanostructure arrays**: Although plasmonic nanostructure arrays can work in both reflection and transmission modes, they have problems such as wide spectra and low reflection/transmission efficiencies, mainly due to the high ohmic losses of plasmonic metals.

3. **Limitations of all - dielectric metasurfaces**: Although all - dielectric metasurfaces have low intrinsic losses, their applications in the transmission mode are limited. They usually can only produce transmission notches and have insufficient signal enhancement in gas - sensing applications.

To solve the above problems, the paper proposes a hybrid metal - dielectric metasurface. By combining the advantages of metal and dielectric materials, it achieves the characteristics of high transmittance, narrow full - width at half - maximum (FWHM), and local field enhancement. The specific objectives are as follows:

- **High transmittance**: Achieve 80% transmittance at a wavelength of 2.6 µm.
- **Narrow FWHM**: Achieve an FWHM of 0.4 µm at a wavelength of 2.6 µm.
- **Local field enhancement**: Improve the detection sensitivity for low - concentration gases.
- **Tunable central wavelength**: By adjusting geometric parameters, design band - pass filters with different central wavelengths.

Through numerical simulation, experimental verification, and practical applications, the paper demonstrates the excellent performance of this hybrid metasurface in CO₂ gas detection, reaching a detection limit (LOD) of approximately 0.04%. In addition, the paper also describes in detail the manufacturing process of this metasurface. A one - step lithography method, deposition of metal and dielectric materials, and a standard lift - off process are adopted, which simplifies the manufacturing process and reduces costs.