Abstract:State-of the-art infrared photodetectors operating in the mid- and long-wavelength infrared (MWIR and LWIR) are largely dominated by cryogenically cooled quantum sensors when the target is the highest sensitivity and detection speeds. Nano-thermoelectrics provide a route towards competitive uncooled infrared bolometer technology that can obtain high speed and sensitivity, low-power operation, and cost-effectiveness. We demonstrate nano-thermoelectric LWIR bolometers with fast and high-sensitivity response to LWIR around 10 $\mu$m. These devices are based on ultra-thin silicon membranes that utilize the dimensional scaling of silicon nanomembranes in thermoelectric elements and are combined with metallic nanomembranes with subwavelength absorber structures. The fast device performance stems from a low heat capacity design where the thermoelectric beams act both as mechanical supports and transducer elements. Furthermore, by scaling down the thickness of the thermoelectric beams the thermal conductivity is reduced owing to enhanced phonon boundary scattering, resulting in increased sensitivity. The nano-thermoelectric LWIR bolometers are based on 40-nm-thick n- and p-type silicon membranes with LWIR (voltage) responsivities up to 1636 V/W and 1350 V/W and time constants in the range of 300-600 $\mu$s, resulting in specific detectivities up to $1.56\times10^8$ cmHz$^{1/2}$/W. We also investigate the use of a heavily doped N++ substrate to increase optical cavity back reflection, resulting in an increased Si substrate reflectance from 30% to 70%-75% for wavelengths between 8-10 $\mu$m, resulting in an increase in device responsivity by approximately 20%.

Thermoplasmonic Membrane-Based Infrared Detector

Thermoplasmonic Study of a Triple Band Optical Nanoantenna Strongly Coupled to Mid IR Molecular Mode

Nanoantenna Integrated Thermomechanical Infrared Detector

Plasmonics Nanosensor

CMOS MEMS Thermoelectric Infrared Sensor With Plasmonic Metamaterial Absorber for Selective Wavelength Absorption and Responsivity Enhancement

Mid-Infrared Sensor Based on a Suspended Microracetrack Resonator With Lateral Subwavelength-Grating Metamaterial Cladding

Electrical Detection of Plasmonic Waves Using an Ultra-Compact Structure Via a Nanocavity.

Temperature Sensor of MoS2 Based on Hybrid Plasmonic Waveguides

Tunable Narrowband Mid-Infrared Thermal Emitter with a Bilayer Cavity Enhanced Tamm Plasmon.

Optomechanical Infrared Detector Monolithically Integrated with Micro-Metalens Array

Study on a High Performance MEMS Infrared Thermopile Detector

Detecting mid-infrared light by molecular frequency upconversion with dual-wavelength hybrid nanoantennas

Thermal detector based on a suspended polyimide membrane for infrared radiation applications

Resonant thermoelectric nanophotonics

Plasmonic Light Harvesting for Multicolor Infrared Thermal Detection.

Photothermal-pyroelectric-plasmonic coupling for high performance and tunable band-selective photodetector

A High-Sensitivity Refractive-Index Sensor Based on Plasmonic Waveguides Asymmetrically Coupled with A Nanodisk Resonator

Tunable nano-plasmonic photodetectors

Infrared Bolometers Based on 40-nm-Thick Nano-Thermoelectric Silicon Membranes

Plasmon-Assisted Mass Sensing In A Hybrid Nanocrystal Coupled To A Nanomechanical Resonator

Nano-thermoelectric infrared bolometers