Synthesis of ZnO thin film for surface acoustic filter fabrication

Jingjing Chen,Dongmei Li,Feng Pan
2004-01-01
Abstract:Low voltage ZnO film was deposited on glass substrate by gas discharge reactive evaporation to fabricate varistors. The film was characterized with X-ray diffraction (XRD) and scanning electron microscopy (SEM). The results show that c-axis oriented grains, 50 nm in diameter and pores coexist in the film and that annealing temperature strongly affects its I-V characteristics. Annealing reduces its leakage current and the operating voltage of the varistor.
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