Sandwich-structured ZnO-MnO2-ZnO thin film varistors prepared via magnetron sputtering

Xingyue Liu,Zhenya Lu,Zhi Jia,Zhiwu Chen,Xin Wang
DOI: https://doi.org/10.1016/j.jeurceramsoc.2023.01.030
IF: 5.7
2023-07-01
Journal of the European Ceramic Society
Abstract:ZnO varistors are widely used to protect electronic circuits form transient voltages. However, it is difficult to prepare varistors with voltage less than 10 V using ZnO ceramics. Here we prepared a ZnO-MnO2-ZnO (ZMZ) sandwich thin film via magnetron sputtering and subsequent annealing at 200-500 °C. With the increase of annealing temperature, the manganese oxide sandwich layer reacts with the upper and lower ZnO layer and becomes thinner. After annealed at 500 °C, because of ZnO grain growth, the upper and lower ZnO layers joined together. The electrical properties of ZMZ films annealed at 400 °C show strong nonlinear I-V characteristics. A ZMZ low voltage thin film varistor with planar boundary potential barrier was obtained whose nonlinear coefficient α and varistor voltage V1 mA are about 30 and 6.0 V, respectively. The stable and excellent nonlinear characteristics make it a promising candidate for overvoltage protection in low operating voltage circuits.
materials science, ceramics
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