Preparation of PZT/LNO capacitor and investigation of its fatigue property

Xiaoxu Kang,Yinyin Lin,Ting'ao Tang,Xiaoguang Wang,Yu Zhong,Weining Huang,GuoBao Jiang
2003-01-01
Abstract:The capacitor with the structure of Au(Cr)/PZT/LNO/SiO2 was prepared, and its anti-fatigue property compared with conventional Pt bottom electrode was greatly improved. Under 10 V and 1 MHz, its (P*-P^) has a reduction of 11% after 1011 cycles because the conducting oxide electrode can reduce the accumulation of the oxygen vacancies at the interface of PZT and electrode. Fatigue tests were carried out under different frequency and pulse-width, and it was concluded that anti-fatigue property can be improved with the increase of frequency or the reduction of pulse-width. The results were explained through the phenomenon of migration of oxygen vacancies and the increase of charged defects.
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