The Properties of Multi-Layered Pt/(Ba0.5sr0.5)Tio3/Pb(Zr0.52ti0.48)O-3/(Ba0.5sr0.5)Tio3/Pt Capacitors

F Yan,P Bao,JS Zhu,YN Wang
DOI: https://doi.org/10.1080/713718261
2002-01-01
Integrated Ferroelectrics
Abstract:Multi-layered Pt/(Ba 0.5 Sr 0.5 )TiO 3 /Pb(Zr 0.52 Ti 0.48 )O 3 / (Ba 0.5 Sr 0.5 )TiO 3 /Pt (Pt/BST/PZT/BST/Pt) thin films with different thickness of the BST layer were prepared by the pulsed laser deposition method. The introduction of a BST layer between PZT and Pt electrode can greatly improve the fatigue properties of the PZT capacitor. However, the hetero structure with the thicker BST layer exhibits slimmer hysteresis loop because lower electric field applied on the PZT layer. A hetero structure with a very thin BST layer (thickness ∼7.5nm) has a high remnant polarization and rare fatigue resistance after 10 10 switching cycles. We attribute the effect of BST layer on the fatigue properties to absorbing the oxygen vacancies in the PZT layer.
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