Abstract:Sb-doped SnO 2 (ATO) films have received extensive attention as transparent conductive films, but there is still a lack of in-depth and systematic study on combined effects of substrate temperature ( T s ) and annealing temperature ( T a ) on their transparent conductive properties. In this study, ATO films were prepared using RF magnetron sputtering at RT∼400 °C and subsequently annealed at 200–1000 °C. The results show that the conductive properties of the films enhance (with a decrease in resistivity from 1.15×10 -1 to 2.15×10 -3 Ω•cm) and the average visible-light transmittance ( T Vis ) decreases (90.16 → 38.24%) with increase of T s . With the increase of T a , the conductive properties of the films prepared at different T s tend to first enhance and then degrade, and the T Vis basically shows a trend of first decreasing and then increasing. After annealing at 600 °C, the films prepared at RT and 100 °C can achieve better comprehensive properties (resistivity of 2.50×10 -3 and 1.64×10 -3 Ω•cm, carrier concentration of 3.35×10 20 and 4.93×10 20 cm -3 , mobility of 7.73 and 7.76 cm 2 /V•s, sheet resistance of 84 and 55 Ω/sq., and T Vis of 86.63 and 79.50%). In order to explore the intrinsic mechanism of the optical and electrical performance of ATO films changing with T s and T a , the preferred orientation, crystallinity, and stress state of the films were analyzed by XRD, and their surface morphology was observed by SEM. Meanwhile, the chemical states of Sn, O and Sb as well as Sb content in the films were analyzed by XPS, and their lattice vibration modes of the film were studied by Raman spectra. Finally, the process-structure-properties correlations were established for the ATO films.

EFFECTS OF DOPING RATE AND TREATMENT TEMPERATURE ON ELECTRICAL PROPERTIES AND STRUCTURE OF ANTIMONY DOPED TIN OXIDE

Effects of Doping Ratio and Calcinations on Structure and Electrical Conductivity of Antimony Doped Tin Oxide

Preparation of Antimony Doped Tin Oxide (ATO) Nanopowders by Hydrothermal Method

FABRICATION AND PROPERTIES OF ANTIMONY-DOPED TIN OXIDE-COATED SILICON DIOXIDE CONDUCTIVE POWDER

HYDROTHERMAL SYNTHESIS OF MONODISPERSED ANTIMONY-DOPED TIN OXIDE CONDUCTIVE NANOPARTICLES

Fabrication and Excellent Conductive Performance of Antimony-Doped Tin Oxide-Coated Diatomite with Porous Structure

Synthesis of Tin Oxide Nanoparticles by Precipitation Process: Effects of pH and Temperature on the Particle Size and Morphology

Synthesis and Characterization of Antimony-Doped Tin Oxide (ATO) Nanoparticles by a New Hydrothermal Method

Structural, morphological, electrical and optical properties of SnO2 nanoparticles: influence of Sb doping

The effect of hydro-thermal synthesis temperature on the dye sensitized TiO2 electrode

Silver Co-Doping Effect on the Antimony Doped Tin Dioxide Electrode

Fabrication of Three-Dimensional Mesoporous Structure Antimony-Doped Tin Oxide with Excellent Conductive Performance

Study on structural and optical properties of Sn-doped ZnO nanoarrays

One-Step Synthesis of Monodispersed Antimony-Doped Tin Oxide Suspension

Praparation and Characterization of Powder of nano-ZnO Coated by ATO

Effect of Sb doping on structural and photoelectric properties of SnO2 thin films

Influence of Synthesis Conditions on Conductivity of ATO-coated Silicon Dioxide

Study On The Effect Of High V Doping On The Conductivity Of Anatase Tio2

Combined effects of substrate temperature and post annealing temperature on structural, optical and electrical properties of Sb-doped SnO 2 films

pH-dependent doping level and optical performance of antimony-doped tin oxide nanocrystals as nanofillers of spectrally selective coating for energy-efficient windows

Abnormal dependence of microstructures and electrical properties of Y-doped VO2 thin films on deposition temperature