Anodic characteristic during anodizing of electron-beam evaporation Aluminum film on Si substrate

Jianping Zou,Junhui Wu,Qing Zhu,Lin Pu,Jianmin Zhu,Ximao Bao
2000-01-01
Abstract:The porous anodizing process of aluminum film deposited by electron beam evaporation on Si substrate was studied. It is found that three stages are involved in the process, i.e. formation of porous alumina, transition stage from alumina growth to oxidation of Si and further oxidation of Si. Cross-sectional TEM analysis of the samples shows nanopore arrays have been fabricated on Si substrate separated by a thin SiO2 layer. Moreover, studies suggest that the ordered pore structure of alumina film can be formed by self-organization process in a noncrystalline aluminum film. It is possible to transplant the fabrication technology of porous alumina to Si substrate, which can provide a new template for fabrication of Si-based nanostructure materials.
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