Abstract:A convenient fabrication technology for large-area, highly-ordered nanoelectrode arrays on silicon substrate has been described here, using porous anodic alumina (PAA) as a template. The ultrathin PAA membranes were anodic oxidized utilizing a two-step anodization method, from Al film evaporated on substrate. The purposes for the use of two-step anodization were, first, improving the regularity of the porous structures, and second reducing the thickness of the membranes to 100-200 nm we desired. Then the nanoelectrode arrays were obtained by electroless depositing Ni-W alloy into the through pores of PAA membranes, making the alloy isolated by the insulating pore walls and contacting with the silicon substrates at the bottoms of pores. The Ni-W alloy was also electroless deposited at the back surface of silicon to form back electrode. Then ohmic contact properties between silicon and Ni-W alloy were investigated after rapid thermal annealing. Scanning electron microscopy (SEM) observations showed the structure characteristics, and the influence factors of fabrication effect were discussed. The current-voltage (I-V) curves revealed the contact properties. After annealing in N2 at 700 degrees C, good linear property was shown with contact resistance of 33 omega, which confirmed ohmic contacts between silicon and electrodes. These results presented significant application potential of this technology in nanosize current-injection devices in optoelectronics, microelectronics and bio-medical fields.

Formation of Si-based Nano-Island Array on Porous Anodic Alumina

Formation of an Array of Isolated Alumina Nanotubes

Anodizing process of Al films on Si substrates for forming alumina templates with short-distance ordered 25 nm nanopores

Fabrication of in Situ Ultrathin Anodic Aluminum Oxide Layers for Nanostructuring on Silicon Substrate

Nanoscale Islands and Color Centers in Porous Anodic Alumina on Silicon Fabricated by Oxalic Acid

A Nano-MOS Array: Metallic Carbon Nanostructure Connected with Nanoscale SiO2Islands Inside Insulated Alumina Nanochannels on Silicon Substrate

Preparation of Si Nanocrystals Using Anodic Porous Alumina Template Formed on Silicon Substrate

Large-scale Synthesis of Silicon Arrays of Nanowire on Titanium Substrate As High-Performance Anode of Li-ion Batteries

Cu Oxide Nanowire Array Grown on Si-based SiO2 Nanoscale Islands Via Nanochannels

Ordered Amorphous Silicon Nanoisland Arrays and Reflection Spectral Dependence on Nanoisland Geometrical Parameters

Formation Mechanism of Alumina Nanotubes and Nanowires from Highly Ordered Porous Anodic Alumina Template

Long-Range-Ordered Ag Nanodot Arrays Grown on Gaas Substrate Using Nanoporous Alumina Mask

Simultaneous Fabrication of Open-Ended Porous Membrane and Microtube Array in One-Step Anodization of Aluminum

Alumina Nanowire Arrays Standing on a Porous Anodic Alumina Membrane

In Situ Fabrication of Alumina Nanotube Array and Photoluminescence

Formation and Field Emission Characteristics of Amorphous and Crystalline Si Nanoarrays

Novel Sandwich Structure for Aluminum Induced Crystallization of Amorphous Silicon Thin Films at Low Temperature

Fabrication of Silicon-Based Template-Assisted Nanoelectrode Arrays and Ohmic Contact Properties Investigation.

Si-based Nanoscale SiO2 Islands and Light-Emitting Source Array

Formation of Anodic Aluminum Oxide with Serrated Nanochannels.

Fabrication of Surfaces with Nanoislands of Chemical Functionality by the Phase Separation of Self-Assembling Monolayers on Silicon