A Nano-MOS Array: Metallic Carbon Nanostructure Connected with Nanoscale SiO2Islands Inside Insulated Alumina Nanochannels on Silicon Substrate

Y. F. Mei,G. G. Siu,Ricky K. Y. Fu,Paul K. Chu,J. P. Zhai,Y. J. Wang,O. K. C. Tsui,Z. K. Tang,J. J. Shi,M. G. Kong
DOI: https://doi.org/10.1109/nanoel.2006.1609760
2006-01-01
Abstract:A nano-MOS array consisting of metallic carbon nanostructures connected with nanoscale SiO2islands inside insulated alumina nanochannel on silicon substrate was fabricated via Si-based porous anodic alumina (PAA) template. The electrical properties of the nano-MOS array were studied by means of current-voltage (I-V) and frequency dependent capacitance-voltage (C-V) tests. This structure is important to the application of carbon nanostructures and PAA template and has high potential in future nanoelectronics applications.
What problem does this paper attempt to address?