Abstract:Searching for the relationship between the nanostructure and optical properties has always been exciting the researchers in the field of optics (linear optics as well as non-linear optics), energy harvesting (anti-reflective Si solar cells, perovskite solar cells, ..., etc.), and industry (anti-reflection coating on car windows, sunglasses, etc.). In this work, we present an approach for nanostructuring the silicon substrate to silicon photonic crystals. By precisely controlling the etching time and etching path after using nanoimprint lithography, ordered arrays of inverted Si nanopyramids and Si nanopillars with good homogeneity, uniform surface roughness, high reproducibility of pattern transfer, and a controllable aspect ratio are prepared. Experimental investigation of the optical properties indicates that the reflections of these Si nanostructures are mainly determined by the aspect ratio as well as the period of nanostructures. Furthermore, we have experimentally observed visible-light scattering (V-LS) patterns on inverted Si nanopyramids and Si nanopillars, and their corresponding patterns can be precisely controlled by the patterned nanostructures. The V-LS pattern, background, and "ghost peaks" on the angle-resolved scattering results are caused by constructive interference, destructive interference, and the interference situation between both. This controllable nanopatterning on crystalline Si substrates with precisely tunable optical properties shows great potential for applications in many fields, for example, optics, electronics, and energy.

Ordered Amorphous Silicon Nanoisland Arrays and Reflection Spectral Dependence on Nanoisland Geometrical Parameters

Optical Device Based on a Nanopillar Array by the Pattern Transfer of an Anodic Aluminum Oxide Membrane

Design and analysis of one-dimensional nanostructure on amorphous silicon solar cell for surface reflectance reduction

Enhanced Reflection from Arrays of Silicon Based Inverted Nanocones

Fabrication of Anti-reflecting Si Nano-structures with Low Aspect Ratio by Nano-sphere Lithography Technique

Enhanced Optical Absorption of Amorphous Silicon Films by Ag Nanostructures

Formation of Si-based Nano-Island Array on Porous Anodic Alumina

Low Reflectance Gaas Nano-Cones Fabricated By Colloidal Lithography For Solar Cells

Morphology Control and Electron Field Emission Properties of High-Ordered Si Nanoarrays Fabricated by Modified Nanosphere Lithography

Si-based Nanoscale SiO2 Islands and Light-Emitting Source Array

Fabrication and Characterization of Inverted Silicon Pyramidal Arrays with Randomly Distributed Nanoholes

Optical Emission from Silicon-Based Sio2 Islands Fabricated by Anodic Alumina Templates

Optical absorption enhancement in amorphous silicon nanowire and nanocone arrays.

Tailoring Patterned Visible-Light Scattering by Silicon Photonic Crystals

Improved antireflection properties and optimized structure for passivation of well-separated, vertical silicon nanowire arrays for solar cell applications

Wafer-scale high anti-reflective nano/micro hybrid interface structures via aluminum grain dependent self-organization

Improved broadband and quasi-omnidirectional anti-reflection properties with biomimetic silicon nanostructures

High Anti-Reflection Large-Scale Cup-Shaped Nano-Pillar Arrays via Thin Film Anodic Aluminum Oxide Replication

Antireflection Properties and Solar Cell Application of Silicon Nanostructures

An Array of One-Dimensional Porous Silicon Photonic Crystal Reflector Islands for A Far-Infrared Image Detector

Simulation and analysis of the optical performance of silicon nanowire arrays