Improved antireflection properties and optimized structure for passivation of well-separated, vertical silicon nanowire arrays for solar cell applications

zewen zuo,kai zhu,guanglei cui,wanxia huang,jun qu,yi shi,yousong liu,guangbin ji
DOI: https://doi.org/10.1016/j.solmat.2014.03.026
IF: 6.9
2014-01-01
Solar Energy Materials and Solar Cells
Abstract:Large-area, well-separated, and vertically aligned silicon nanowire (SiNW) arrays with excellent antireflection properties were fabricated through a combination of anodic aluminum oxide template and metal-assisted chemical etching, followed by supercritical drying. Less than 1% reflectance was achieved over the wavelength range of 200–600nm, and 23% reduction in average reflectance was observed over the 200–1000nm range, compared with the conical-frustum structure array by natural drying. Furthermore, the well-separated SiNW arrays considerably facilitated the conformal coating of the plasma-enhanced chemical vapor deposited amorphous silicon layer on the SiNW surface, which could result in effective passivation of surface states. Therefore, such well-separated and vertically aligned SiNW arrays are highly promising for solar cell application.
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