Anodizing Behavior of Aluminum Foil Patterned with SiO[sub 2] Mask

YJ Xiang
DOI: https://doi.org/10.1149/1.2013187
IF: 3.9
2005-01-01
Journal of The Electrochemical Society
Abstract:SiO2-patterned anodic aluminum oxide (AAO) is fabricated on the surface of aluminum (Al) foil by combining both photolithography and anodizing technique. Tilted pores and ridge-like features on the Al surface are observed under the SiO2 mask by scanning electron microscopy characterization. A mechanism based on the deflection of electric field due to the existence of SiO2 barrier on Al surface has been proposed to explain the observed anodizing behavior. Moreover, large-scale ordered metallic Al patterns are also revealed by removing the AAO film and SiO2 mask. (c) 2005 The Electrochemical Society.
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