Electrochemical Lithography: Fabrication of Nanoscale Si Tips by Porous Anodization of Al/Si Waferelectronic Supplementary Information (ESI) Available: Cartoon of Tip Formation and Discussion on the Sample Anodising under 40 V Dc. See Http://Www.rsc.org/suppdata/cc/b3/b315810a/

Lin Peng,Yi Shi,Jun‐Jie Zhu,Xiaoguang Bao,R Zhang,Youdou Zheng
DOI: https://doi.org/10.1039/b315810a
IF: 4.9
2004-01-01
Chemical Communications
Abstract:Porous anodization of Al/Si wafer in sulfuric acid results in the formation of Si nanotips on the surface of Si substrate with ultrahigh packing density.
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