Intense UV-visible Photoluminescence from Si/sup +/ and N/sup +/ Co-Implanted Thermal SiO/sub 2/ Films

YH Yu,L Li,YM Lei,J Zhao,DS Mao,SC Zou,B Sundaraval,EZ Luo,SP Wong,JB Xu,IH Wilson
DOI: https://doi.org/10.1109/.2000.924266
2003-01-01
Abstract:Intense UV-visible photoluminescence (PL) is observed at room temperature from thermal SiO/sub 2/ films implanted with Si and N ions. A flat Si profile was first created. N ions were subsequently implanted into the same depth region as the implanted Si ions. Two PL bands peaking at /spl sim/330 nm and /spl sim/430 nm were observed from the samples at room temperature with and without annealing. The stability of the implanted ions particularly N ions is evaluated by non-Rutherford backscattering spectroscopy. Electron spin resonance was also used to characterize the modifications of the Si/sup +/ and N/sup +/ coimplanted SiO/sub 2/ films. It is found that the PL has a strong dependence on the stabilized N in the Si/sup +/ and N/sup +/ coimplanted SiO/sub 2/ films. The PL is suggested to originate from complex of Si, N and O.
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