AFM analysis of (Pb, La) TiO3 film prepared by RF magnetron sputtering at room temperature

Jiliang Zhu,Jianguo Zhu,Lin Shen,Yuanyuan Pan,Dingquan Xiao
2000-01-01
Abstract:The (Pb, La) TiO3 (PLT) thin films were prepared by RF magnetron sputtering technology at room temperature, and annealed at 600°C in air for 2 hs. The XRD and AFM analyses show that the film is a compact, continuous, even and pure perovskite PLT ferroelectric thin film. Annealing does not affect the roughness of the thin film very much, and the roughness of the thin films depends mainly on the processing of deposition.
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