Abstract:Our previous strategy was further used to design an amorphous structure with exceptional thermal stability. SixNbTaTiZr (x = 0, 1) thin films were investigated on amorphous structure, thermal stability, mechanical and electrical properties. The amorphous structure of NbTaTiZr is retained after vacuum annealing at 500 °C for 1 h and crystallizes after annealing at 550 °C for 1 h whereas that of SiNbTaTiZr is retained at 850 °C for 1 h and crystallizes at 900 °C for 1 h. In addition, thermal stability of amorphous SiNbTaTiZr is also superior than reported amorphous alloy films. Thermodynamic, topological and kinetic factors governing the exceptional thermal stability of SiNbTaTiZr are discussed via high entropy effect, mixing enthalpy, melting point, atomic size difference and multi-element-cooperation diffusion, respectively. SiNbTaTiZr amorphous film has higher nanohardness, Young’s modulus, extremely low roughness, and resistivity but smaller negative temperature coefficient of resistivity than NbTaTiZr. This is mainly attributable to the large negative mixing enthalpy between Si and other elements. All these merits make SiNbTaTiZr a promising amorphous thin film for many advanced applications such as high-temperature diffusion barriers, reaction barriers, and light and heat reflectors of solar energy.

Solid-State Amorphization in the Y-Nb and Au-Ta Systems

Formation of Amorphous Alloys Through the Multilayer Method in an Immiscible Y - Nb System

Exceptional Thermal Stability and Properties of Amorphous High-Entropy SiNbTaTiZr Thin Films

Amorphous Alloys Formed by Ion Mixing or Solid-State Reaction in Immiscible Y-Refractory Metal Systems and Their Elastic Properties

Atomistic Modeling of Solid-State Amorphization in an Immiscible Cu-Ta System

Abnormal Alloying Behaviour Observed in an Immiscible Zr–Nb System

Interface Stability and Solid-State Amorphization in an Immiscible Cu-Ta System

Solid-state Amorphization in Ni/Nb Mutilayers Studied by Molecular-Dynamics Simulation Together with Experiments

Proposed Interpretation for Possible Solid-State Amorphization in Some Cu-based Binary Metal Systems

Metastable Phases Formed by Ion Mixing in the Hf-Nb System with A Positive Heat of Formation

Al-Yb Amorphous-Alloys Produced by Ion Mixing or Solid-State Reaction

Interface-Driven Solid-State Alloying in an Immiscible Cu-W System

Influence Of Interfacial Texture On Solid-State Amorphization And Associated Asymmetric Growth In Immiscible Cu-Ta Multilayers

Unusual Alloying Behavior Observed in the Immiscible AgMo and AgNb Systems under Ion Irradiation

Spontaneous Vitrification In The Au-Ta System With A Small-Size Difference

Atomistic mechanism of solid-state amorphization in the Ni-Zr system revealed by molecular dynamics simulation

Metastable alloys synthesized by ion mixing in immiscible Ti–Nb and Ti–Ta systems

Amorphous Alloys Synthesized by Interface-Assisted Ion Beam Mixing in the Ag–W System with the Largest Positive Heat of Formation

Prediction of Solid-State Amorphization in Binary Metal Systems

Atomistic Modeling of Solid-State Amorphization and Atomic Structure of the Cu–Hf System

A comparative study of metastable alloy formation by ion mixing and thermal annealing of multilayers in the immiscible Y–Zr system