Preparation and Characterization of Free-Standing Porous Silicon Films with High Porosity

DS Xu,GL Guo,LL Gui,BR Zhang,GG Qin
DOI: https://doi.org/10.3866/pku.whxb19980701
1998-01-01
Acta Physico-Chimica Sinica
Abstract:We have obtained free-standing porous silicon films with porosity above 90% by using anodic oxidizing, electropolishing, chemical etching and supercritical drying methods. These highly porous films exhibited near 100% transmission in the near infrared and strong photoluminescence (PL). The porosity of these films increased with prolonging the time of chemical etching. Meanwhile, thr blueshift of the optical transmission curves and the increasing of the PL intensity was observed. However, there is no clear size dependence of the peak energy of the FL.
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