Preparation and structure analyses of TiO2 thin films by sol-gel processing

Dinghua Bao,Haoshuang Gu,Guiyu Huang,Anxiang Kuang
1995-01-01
Abstract:TiO thin films were successfully fabricated on quartz glass and single crystal silicon substrates by sol-gel processing, using Ti(OC4H9)4, C2H5OH and HAc as raw materials. The surfaces of the thin films were homogeneous, dense and crack free. Results show that as-deposited films are transformed to rutile via anatase with increasing temperature, and the transformation temperature depends on the substrates. The temperature is generally higher on the substrates than that in gel powder. Oriented rutile films are obtained and average grain size is 0.05-0.15 ��m.
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