New surface passivation technique of GaAs by S2Cl2 treatment

Zheshen Li,Weizhong Cai,Runzhou Su,Xiaoyuan Hou,Guosheng Dong,Xiaofeng Jin,Xunmin Ding,Xun Wang
1994-01-01
Abstract:Photoluminescence spectroscopy combined with Auger electron spectroscopy and X-ray photoelectron spectroscopy is used to study the S2Cl2-passivated GaAs(100) surface. The photoluminescence intensity increases by two orders of magnitude after this treatment, indicating a substantial reduction of surface recombination rate. Auger electron spectroscopy data show that the sulfurized surface contains S, Ga, As, C and small amount of Cl atoms but no oxygen atom at all. X-ray photoelectron spectroscopy results reveal that S atoms bond to both Ga and As atoms, and the sulfide layer is thicker than that by (NH4)2S treatment.
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