Large-scale Fabrication of Nanopatterned Sapphire Substrates by Annealing of Patterned Al Thin Films by Soft UV-nanoimprint Lithography

Lin Cui,Gui-Gen Wang,Hua-Yu Zhang,Jie-Cai Han,Xu-Ping Kuang,Ji-Li Tian,Rui Sun
DOI: https://doi.org/10.1186/1556-276x-8-472
2013-01-01
Nanoscale Research Letters
Abstract:Large-scale nanopatterned sapphire substrates were fabricated by annealing of patterned Al thin films. Patterned Al thin films were obtained by soft UV-nanoimprint lithography and reactive ion etching. The soft mold with 550-nm-wide lines separated by 250-nm space was composed of the toluene-diluted polydimethylsiloxane (PDMS) layer supported by the soft PDMS. Patterned Al thin films were subsequently subjected to dual-stage annealing due to the melting temperature of Al thin films (660°C). The first comprised a low-temperature oxidation anneal at 450°C for 24 h. This was followed by a high-temperature annealing in the range of 1,000°C and 1,200°C for 1 h to induce growth of the underlying sapphire single crystal to consume the oxide layer. The SEM results indicate that the patterns were retained on sapphire substrates after high-temperature annealing at less than 1,200°C. Finally, large-scale nanopatterned sapphire substrates were successfully fabricated by annealing of patterned Al thin films for 24 h at 450°C and 1 h at 1,000°C by soft UV-nanoimprint lithography.
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