Abstract:Femtosecond laser processing technology is an advanced sub-micro-processing technique that enables the non-contact processing of various materials. This technology can be used to apply sub-micro structures for purposes such as hydrophilicity enhancement, optical transmittance improvement, and photonics detection. However, when it comes to processing micro/nanostructures on highly brittle materials using femtosecond lasers, there are challenges such as low processing efficiency, generation of debris, and microcracking. In this paper, we propose a method called the out-of-focus femtosecond laser direct writing technique combined with wet etching. This method offers simplicity, speed, and flexibility in preparing dense, large-area sub-microstructured surfaces on the brittle material sapphire. Our detailed investigation focuses on the impact of laser processing parameters (direct writing period, distance of focusing, direct writing speed, etc.) on the sub-microstructures of Al2O3 surfaces. The results demonstrate that this method successfully creates embedded sub-microstructures on the sapphire surface. The microholes, with a diameter of approximately 2.0 μm, contain sub-micro structures with a minimum width of 250 ± 20 nm. Additionally, we conducted experiments to assess the optical transmittance of sapphire nanostructures in the range of 350–1200 nm, which exhibited an average transmittance of approximately 77.0%. The water contact angle (CA) test yielded a result of 52 ± 2°, indicating an enhancement in the hydrophilicity of the sapphire nanostructures with only a slight reduction in optical transmittance. Our efficient fabrication of sub-microstructures on the sapphire surface of highly brittle materials offers a promising method for the production and application of brittle materials in the field of micro-optics.

Fabrication of Volcano-Shaped Nano-Patterned Sapphire Substrates Using Colloidal Self-Assembly and Wet Chemical Etching

Fabrication of Nano-Patterned Sapphire Substrates by Combining Nanoimprint Lithography with Edge Effects

Fabrication of Wafer-Scale Nanopatterned Sapphire Substrate Through Phase Separation Lithography

Study on the Morphology and Shape Control of Volcano-Shaped Patterned Sapphire Substrates Fabricated by Imprinting and Wet Etching

Fabrication of the Patterned Sapphire Substrate by the Imprint Lithography with the Flexible Hybrid Mold

Fabrication of Wafer-Scale Nanopatterned Sapphire Substrate by Hybrid Nanoimprint Lithography

Improved performance of GaN-based light emitting diodes with nanopatterned sapphire substrates fabricated by wet chemical etching

Design of patterned sapphire substrates for GaN-based light-emitting diodes

Analysis of Wet-Etched Structures on R-Plane Substrates of Sapphire in the Etchant of Sulfuric Acid and Phosphoric Acid

Nucleation Mechanism of GaN Growth on Wet Etched Pattern Sapphire Substrates

Application of patterned sapphire substrate for III-nitride light-emitting diodes.

3D Nanohole Arrays Generated by Spherical-Lens Photolithography

The effect of inductively-coupled-plasma reactive ion etching power on the etching rate and the surface roughness of a sapphire substrate

A Study of GaN Nucleation and Coalescence in the Initial Growth Stages on Nanoscale Patterned Sapphire Substrates Via MOCVD

Effect of Template–Mediated Alumina Nanoparticle Morphology on Sapphire Wafer Production via Heat Exchange Method

Nanopatterned Graphene: Direct Growth of Nanopatterned Graphene on Sapphire and Its Application in Light Emitting Diodes (Adv. Funct. Mater. 31/2020)

The improvement of GaN-based light-emitting diodes using nanopatterned sapphire substrate with small pattern spacing

The Effect of Nitridation on Sputtering AlN on Composited Patterned Sapphire Substrate

Enhancing light extraction efficiency of the inclined-sidewall-shaped DUV micro-LED array by hybridizing a nanopatterned sapphire substrate and an air-cavity reflector

A Method for Preparing Surface Sub-Microstructures on Sapphire Surfaces Using Femtosecond Laser Processing Technology

Direct Growth of Globally Aligned Graphene Nanoribbons on Reconstructed Sapphire Substrate Using PECVD