Abstract:Light emitting diodes (LEDs) in the deep ultra-violet (DUV) offer new perspectives for multiple applications ranging from 3D printing to sterilization. However, insufficient light extraction severely limits their efficiency. Nanostructured sapphire substrates in aluminum nitride based LED devices have recently shown to improve crystal growth properties, while their impact on light extraction has not been fully verified. We present a model for understanding the impact of nanostructures on the light extraction capability of DUV-LEDs. The model assumes an isotropic light source in the semiconductor layer stack and combines rigorously computed scattering matrices with a multilayer solver. We find that the optical benefit of using a nanopatterned as opposed to a planar sapphire substrate to be negligible, if parasitic absorption in the p-side of the LED is dominant. If losses in the p-side are reduced to 20%, then for a wavelength of 265 nm an increase of light extraction efficiency from 7.8% to 25.0% is possible due to nanostructuring. We introduce a concept using a diffuse ('Lambertian') reflector as p-contact, further increasing the light extraction efficiency to 34.2%. The results underline that transparent p-sides and reflective p-contacts in DUV-LEDs are indispensable for enhanced light extraction regardless of the interface texture between semiconductor and sapphire substrate. The optical design guidelines presented in this study will accelerate the development of high-efficiency DUV-LEDs, but the model is also readily applicable to other multilayer opto-electronic nanostructured devices such as photovoltaics or photodetectors.

Enhancing light extraction efficiency of the inclined-sidewall-shaped DUV micro-LED array by hybridizing a nanopatterned sapphire substrate and an air-cavity reflector

Enhanced light extraction efficiency for the inclined-sidewall-shaped AlGaN-based DUV LED by using an omni-directional reflector with a thin hybrid dielectric layer

Nanopatterned Sapphire Substrates in Deep-UV LEDs: Is there an Optical Benefit?

Promoting Light Extraction Efficiency of Ultraviolet Light Emitting Diodes by Nanostructure Optimization

Colloidal etching of deep ultraviolet LED with improved light extraction efficiency

Efficiency improvement analysis of nano-patterned sapphire substrates and semi-transparent superlattice contact layer in UVC light-emitting diodes

Breaking the Transverse Magnetic-Polarized Light Extraction Bottleneck of Ultraviolet-C Light-Emitting Diodes Using Nanopatterned Substrates and an Inclined Reflector

Maximizing the Light Extraction Efficiency for AlGaN-Based DUV-LEDs with Two Optimally Designed Surface Structures under the Guidance of PSO

Enhanced Light Extraction by Surface Structure Inverse Design Based on Intelligence Algorithm for DUV-LEDs

A scattered volume emitter micropixel architecture for ultra efficient light extraction from DUV LEDs

Suppressing optical crosstalk for GaN/InGaN based flip-chip micro light-emitting diodes by using an air-cavity patterned sapphire substrate as a light filter

On the origin of the enhanced light extraction efficiency of DUV LED by using inclined sidewalls

Light Extraction Enhancement of AlGaN-based Ultraviolet Light-Emitting Diodes by Substrate Sidewall Roughening

282-Nm Algan-Based Deep Ultraviolet Light-Emitting Diodes with Improved Performance on Nano-Patterned Sapphire Substrates

Improved performance of GaN-based light emitting diodes with nanopatterned sapphire substrates fabricated by wet chemical etching

Fabrication of Wafer-Scale Nanopatterned Sapphire Substrate by Hybrid Nanoimprint Lithography

A Cost Effective Process for Large Area Photonic Array Applied in Light Emitting Diodes for Light Extraction Enhancement

Enhanced Light Extraction by Optimizing Surface Microstructure for AlGaN-based Deep Ultraviolet Light Emitting Diodes with 265 and 280 Nm Emission

Preparation of Dome-Shaped SiO$_\text{2}$/Al$_\text{2}$O$_\text{3}$ Composite-Patterned Sapphire Substrate for High-Performance Mini-LED Backlight Modules

Nanoimprinted patterned sapphire with silica array for efficient InGaN-based green mini-LEDs

The Implementation of Sapphire Microreflector for Monolithic Micro-LED Array