Performance comparison of front- and back-illuminated AlGaN-based metal-semiconductor-metal solar-blind ultraviolet photodetectors

Guosheng Wang,Feng Xie,Hai Lu,Dunjun Chen,Rong Zhang,Youdou Zheng,Liang Li,Jianjun Zhou
DOI: https://doi.org/10.1116/1.4769250
2013-01-01
Abstract:In this work, AlGaN-based metal-semiconductor-metal solar-blind ultraviolet photodetectors (PDs) with low dark current were fabricated on sapphire substrates. In both front-and back-illumination operation modes, the PDs exhibited sharp photoresponse cutoffs at similar to 280nm with solar-blind/ultraviolet rejection ratios of more than 10(3). The quantum efficiency of the back-illuminated PD was observed to generally be higher than that of the front-illuminated PD. Nevertheless, at very low bias range, the front-illuminated PD exhibited greater photoresponsivity. The observed performance differences of the PDs in the different illumination modes are discussed in terms of surface reflectivity and photocarrier collection efficiency. (C) 2013 American Vacuum Society. [http://dx.doi.org/10.1116/1.4769250]
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