High Quantum Efficiency Back-Illuminated AlGaN-Based Solar-Blind Ultraviolet P—i—n Photodetectors

Wang Guo-Sheng,Lu Hai,Xie Feng,Chen Dun-Jun,Ren Fang-Fang,Zhang Rong,Zheng You-Dou
DOI: https://doi.org/10.1088/0256-307x/29/9/097302
2012-01-01
Chinese Physics Letters
Abstract:AlGaN-based back-illuminated solar-blind ultraviolet (UV) p-i-n photodetectors (PDs) with high quantum efficiency are fabricated on sapphire substrates. To improve the overall performance of the PD, a series of structural design considerations and growth procedures are implemented in the epitaxy process. A distinct wavelength-selective photo-response peak of the PD is obtained in the solar-blind region. When operating in photovoltaic mode, the PD exhibits a solar-blind/UV rejection ratio of up to 4 orders of magnitude and a peak responsivity of similar to 113.5 mA/W at 270 nm, which corresponds to an external quantum efficiency of similar to 52%. Under a reverse bias of -5 V, the PD shows a low dark current of similar to 1.8 pA and an enhanced peak quantum efficiency of similar to 64%. The thermal noise limited detectivity is estimated to be similar to 3.3 x 10(13) cm.Hz(1/2)W(-1).
What problem does this paper attempt to address?