A Back-Illuminated Al0.42 Ga0.58 N/Al0.40 Ga0.60 N Heterojunction P-I-n Solar-Blind UV Photodetector

Cheng Caijing,Ding Jiaxin,Zhang Xiangfeng,Zhao Hongyan,Lu Zhengxiong,Si Junjie,Sun Weiguo,Sang Liwen,Zhang Guoyi
DOI: https://doi.org/10.3321/j.issn:0253-4177.2008.03.032
2008-01-01
Chinese Journal of Semiconductors
Abstract:Back-illuminated Al0.42Ga0.58N/Al0.40Ga0.60N heterojunction p-i-n solar-blind UV photodetectors grown on sapphire by metal organic chemical vapor deposition are fabricated.An ideality factor of n=3 and a series resistance of RS=93Ω are obtained from the forward current-voltage curve of the device.The external quantum efficiency and detectivity at a peak wavelength of 275nm at zero-bias voltage are 9% and 4.98e11cm·Hz1/2·W-1,respectively.Mere 15.7% of the spectral transmittance of the Al0.42Ga0.58N window layer at 275nm results in the low external quantum efficiency and detectivity.
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