An AlGaN-Based Resonant-Cavity-Enhanced P-I-n Ultraviolet Photodetector

Ji Xiaoli,Jiang Ruolian,Zhou Jianjun,Liu Bin,Xie Zili,Han Ping,Zhang Rong,Zheng Youdou,Gong Haimei
DOI: https://doi.org/10.3969/j.issn.1674-4926.2007.12.020
2007-01-01
Chinese Journal of Semiconductors
Abstract:AlGaN-based resonant-cavity-enhanced p-i-n photodetectors operating at a wavelength of 320nm were designed.A 40.5-pair AlN/Al0.3Ga0.7N distributed Bragg reflector and the air/GaN interface,serving as the back and front mirror,respectively,form a resonant cavity.In the cavity there is a p-GaN/ i-GaN/ n-Al0.38Ga0.62N structure.The wafer was fully epitaxial on the sapphire substrate and GaN template by metalorganic chemical vapor deposition.The response spectrum exhibits selective enhancement at 313nm,with a responsivity of 14mA/W under zero bias.
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