Abstract:We investigate the architecture of microfabricated vapor cells with reflective sidewalls for applications in chip scale atomic sensors. The optical configuration in operation is suitable for both one-beam and two-beam (pump & probe) schemes. In the miniaturized vapor cells, the laser beam is reflected twice by the aluminum reflectors on the wet etched 54.7° sidewalls to prolong the optical length significantly, thus resulting in a return reflectance that is three times that of bare silicon sidewalls. To avoid limitations faced in the fabrication process, a simpler, more universal and less constrained fabrication process of microfabricated vapor cells for chip scale atomic sensors with uncompromised performance is implemented, which also decreases the fabrication costs and procedures. Characterization measurements show that with effective sidewall reflectors, mm3 level volume and feasible hermeticity, the elongated miniature vapor cells demonstrate a linear absorption contrast improvement by 10 times over the conventional micro-electro-mechanical system (MEMS) vapor cells at ~50 °C in the rubidium D1 absorption spectroscopy experiments. At the operating temperature of ~90 °C for chip scale atomic sensors, a 50% linear absorption contrast enhancement is obtained with the reflective cell architecture. This leads to a potential improvement in the clock stability and magnetometer sensitivity. Besides, the coherent population trapping spectroscopy is applied to characterize the microfabricated vacuum cells with 46.3 kHz linewidth in the through cell configuration, demonstrating the effectiveness in chip scale atomic sensors.

Fabrication of Wafer-Level Spherical Rb Vapor Cells for Miniaturized Atomic Clocks by a Chemical Foaming Process

Microfabrication of <sup>85</sup>rb Vapor Cell for Chip-Scale Atomic Clocks

Microfabrication Of Rb-85 Vapor Cell For Chip-Scale Atomic Clocks

Stable Rb-85 micro vapour cells: fabrication based on anodic bonding and application in chip-scale atomic clocks

Micro Rb atomic vapor cells for the chip-scale atomic clock

Microfabrication and Measurement of Rb-Ne Microcell for Chip-Scale Atomic Clocks

A reflection-type vapor cell using anisotropic etching of silicon for micro atomic clocks

Microfabrication of MEMS Alkali Metal Vapor Cells for Chip-Scale Atomic Devices

Single-step alkaline etching of deep silicon cavities for chip-scale atomic clock technology

Fabrication and Study of Micro Alkali-Metal Vapor Cell Applied to Chip Scale Atomic Clock

Microfabricated Atomic Vapor Cells with Multi-Optical Channels Based on an Innovative Inner-Sidewall Molding Process

Wafer-scale fabrication of evacuated alkali vapor cells

Wafer-level vapor cells filled with laser-actuated hermetic seals for integrated atomic devices

Long-Term Stability Analysis Toward <10−14 Level for a Highly Compact POP Rb Cell Atomic Clock

Wafer-Level Filling of MEMS Vapor Cells Based on Chemical Reaction and Evaporation

Microfabricated Vapor Cells with Reflective Sidewalls for Chip Scale Atomic Sensors

Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding

Thermal Management of Microfabricated Vapor Cells for Chip Scale Atomic Clocks

Research Progress of Atom Vapor Cell for Chip-Scale Atomic Clock

The research of miniaturization CPT Rb atomic clocks

Imaging Microwave and DC Magnetic Fields in a Vapor-Cell Rb Atomic Clock