Abstract:We investigate the architecture of microfabricated vapor cells with reflective sidewalls for applications in chip scale atomic sensors. The optical configuration in operation is suitable for both one-beam and two-beam (pump & probe) schemes. In the miniaturized vapor cells, the laser beam is reflected twice by the aluminum reflectors on the wet etched 54.7° sidewalls to prolong the optical length significantly, thus resulting in a return reflectance that is three times that of bare silicon sidewalls. To avoid limitations faced in the fabrication process, a simpler, more universal and less constrained fabrication process of microfabricated vapor cells for chip scale atomic sensors with uncompromised performance is implemented, which also decreases the fabrication costs and procedures. Characterization measurements show that with effective sidewall reflectors, mm3 level volume and feasible hermeticity, the elongated miniature vapor cells demonstrate a linear absorption contrast improvement by 10 times over the conventional micro-electro-mechanical system (MEMS) vapor cells at ~50 °C in the rubidium D1 absorption spectroscopy experiments. At the operating temperature of ~90 °C for chip scale atomic sensors, a 50% linear absorption contrast enhancement is obtained with the reflective cell architecture. This leads to a potential improvement in the clock stability and magnetometer sensitivity. Besides, the coherent population trapping spectroscopy is applied to characterize the microfabricated vacuum cells with 46.3 kHz linewidth in the through cell configuration, demonstrating the effectiveness in chip scale atomic sensors.

Microfabrication and Measurement of Rb-Ne Microcell for Chip-Scale Atomic Clocks

Microfabrication of <sup>85</sup>rb Vapor Cell for Chip-Scale Atomic Clocks

Microfabrication Of Rb-85 Vapor Cell For Chip-Scale Atomic Clocks

Micro Rb atomic vapor cells for the chip-scale atomic clock

Stable Rb-85 micro vapour cells: fabrication based on anodic bonding and application in chip-scale atomic clocks

Microfabrication of MEMS Alkali Metal Vapor Cells for Chip-Scale Atomic Devices

Atomic Magnetometer with Microfabricated Vapor Cells Based on Coherent Population Trapping

Imaging Microwave and DC Magnetic Fields in a Vapor-Cell Rb Atomic Clock

Microfabricated Vapor Cells with Reflective Sidewalls for Chip Scale Atomic Sensors

A reflection-type vapor cell using anisotropic etching of silicon for micro atomic clocks

Fabrication and Study of Micro Alkali-Metal Vapor Cell Applied to Chip Scale Atomic Clock

Single-step alkaline etching of deep silicon cavities for chip-scale atomic clock technology

A (85)rb Coherent Population Trapping Atomic Clock

Characterization of <SUP>87</SUP>Rb MEMS vapor cells for miniature atomic magnetometers

Characterization of 87Rb MEMS vapor cells for miniature atomic magnetometers

Thermal Management of Microfabricated Vapor Cells for Chip Scale Atomic Clocks

Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding

A chip-scale atomic beam clock

Level assessment of 87 Rb in rubidium-filled MEMS vapor cells by X-ray imaging for atomic magnetometers

Investigation on Spin Relaxation of Microfabricated Vapor Cells with Buffer Gas

Long-Term Stability Analysis Toward <10−14 Level for a Highly Compact POP Rb Cell Atomic Clock