Template-free fabrication of silicon micropillar/nanowire composite structure by one-step etching

Fan Bai,Meicheng Li,Rui Huang,Dandan Song,Bing Jiang,Yingfeng Li
DOI: https://doi.org/10.1186/1556-276X-7-557
2012-01-01
Nanoscale Research Letters
Abstract:A template-free fabrication method for silicon nanostructures, such as silicon micropillar (MP)/nanowire (NW) composite structure is presented. Utilizing an improved metal-assisted electroless etching (MAEE) of silicon in KMnO 4 /AgNO 3 /HF solution and silicon composite nanostructure of the long MPs erected in the short NWs arrays were generated on the silicon substrate. The morphology evolution of the MP/NW composite nanostructure and the role of self-growing K 2 SiF 6 particles as the templates during the MAEE process were investigated in detail. Meanwhile, a fabrication mechanism based on the etching of silver nanoparticles (catalyzed) and the masking of K 2 SiF 6 particles is proposed, which gives guidance for fabricating different silicon nanostructures, such as NW and MP arrays. This one-step method provides a simple and cost-effective way to fabricate silicon nanostructures.
What problem does this paper attempt to address?