Abstract:Nanofluidic systems are attracting a great deal of interest due to their fundamental significance and potential applications in chemistry, biology and physics. However, high fabrication cost, expensive equipments and complicated fabrication process of most current fabrication techniques prevent lots of researchers from entering the nanofluidic field. Here we present a quick, simple and cost-effective method for fabricating two-dimensional (2D) nanochannel in polycarbonate (PC) substrates. Silica nanowires, taper-drawn from commercially available single-mode fiber were used as templates and embedded in the PC substrate by hot embossing. The nanochannels were created after removing the nanowires by hydrofluoric acid (HF) etching. Poly(dimethylsiloxane) (PDMS) was used to seal the nanochannel reversibly. Nanochannels with widths range from 100 to 900 nm and lengths up to several millimeters were obtained. Various nanostructures including integrated micro and nanochannels, nanochannel array, bent nanochannel and cross-shaped nanochannel were fabricated and characterized by fluorescent microscope, scanning electron microscope (SEM) and atomic force microscope (AFM).

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The fabrication of large-scale sub-10-nm core-shell silicon nanowire arrays

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