Ultrathin HfON/SiO2 Dual Tunneling Layer for Improving the Electrical Properties of Metal–oxide–nitride–oxide–silicon Memory

L. Liu,J. P. Xu,J. X. Chen,F. Ji,X. D. Huang,P. T. Lai
DOI: https://doi.org/10.1016/j.tsf.2012.10.051
IF: 2.1
2012-01-01
Thin Solid Films
Abstract:A high-k gate stack structure with ultrathin HfON/SiO2 as dual tunneling layer (DTL), AlN as charge storage layer (CSL) and HfAlO as blocking layer (BL) is proposed to make a charge-trapping-type metal–oxide–nitride–oxide–silicon non-volatile memory device by employing in-situ sputtering method. The validity of the structure is examined and confirmed by transmission electron microscopy. The memory window, program/erase, endurance and retention properties are investigated and compared with similar gate stack structure with Si3N4/SiO2 as DTL, HfO2 as CSL and Al2O3 as BL. Results show that a large memory window of 3.55V at a program/erase (P/E) voltage of +8V/−15V, high P/E speed, and good endurance and retention characteristic can be achieved using the Au/ HfAlO/AlN/(HfON/SiO2)/Si gate stack structure. The main mechanisms lie in the enhanced electron injection through the ultrathin high-k HfON/SiO2 DTL with suitable band offset, high trapping efficiency of the high-k AlN material, and effective blocking role of the high-k HfAlO BL.
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