Discharge properties and AFM imaging experiments of cantilever probe integrated with microplasma reactor

Leili Cheng,Li Wen,Zhen Yuan,Dun Niu,Liwen He,Jiaru Chu
DOI: https://doi.org/10.1049/mnl.2012.0222
2012-01-01
Micro & Nano Letters
Abstract:A new conception of cantilever array-based microplasma nanoetching and atomic force microscopy (AFM) morphology inspection in the same system is proposed in this Letter. A cantilever probe integrated with microplasma reactor and SiO2 cantilever array with hollow pyramid tip are successfully fabricated. The experiment results show that the microplasma reactor can discharge stably in CHF3/Ar mixture...
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