Abstract:The field of local conductivity measurement has produced many kinds of scanning probes to measure the electricalcharacteristics at the nanoscale. However, due to the design limitations, no appropriate probe has been developed to measureand simultaneously image the electrical characteristics at 100 nm order. This research aims to fabricate a four-pOint AFMprobe in order to image electrical characteristics at 100 nm ord Four-point atomic force microscope probe for imaging the electrical characteristics of materials Lin ZHANG", Yang JU*2 and Atsushi HOSOI*2 *1Nagoya Univ. Dept. of Mechanical science and Engineering Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan The field of local conductivity measurement has produced many kinds of scanning probes to measure the electrical characteristics at the nanoscale. However, due to the design limitations, no appropriate probe has been developed to measure and simultaneously image the electrical characteristics at 100 nm order. This research aims to fabricate a four-point AFM probe in order to image electrical characteristics at 100 nm order. Specifically, a certain tape of AFM probe for cell measurement e.g . Biolever, can be etched into four independent electrodes with an in-between space of 200 nm. The four electrodes are basically used to measure the electrical potential drop by allowing the electric current to pass through. The four-point probe is then integrated into a multimode AFM to realize the scanning and imaging simultaneously. The present experimental results show that the four-point probe fabricated can be used to image the surface topography of the Au nanowire, thereby permitting the simultaneous measurements of surface profiles and electrical characteristics of the samples at the next stage.

NOVEL AFM PROBE FOR LOCAL CONDUCTIVITY MEASUREMENT

Development of a New Microscopic Four-Point AFM Probe for the Measurement of Local Electrical Conductivity

Fabrication of a microscopic four-point probe and its application to local conductivity measurement

Measurement of Local Electrical Conductivity by Four-Point Probe Atomic Force Microscope Technique

Microscopic Four-Point Atomic Force Microscope Probe Technique for Local Electrical Conductivity Measurement

A Methodology for Quantitative Evaluation of Local Electrical Conductivity: from Micron to Submicron

G030083 Four-point Atomic Force Microscope Probe for Imaging the Electrica1 Characteristics of Materials

Structure Modification of M-AFM Probe for the Measurement of Local Conductivity

Methodology for Measurement of Submicron Metallic Wire's Local Electrical Conductivity by Applying Four-points AFM Probe Technique

Quantitative Measurement of Submicrometre Electrical Conductivity

Influence of Material Surface on the Measurement of Local Electrical Conductivity Using Microwave Atomic Force Microscopy

Non-contact Local Conductivity Measurement of Metallic Nanowires Based on Semi-Near-field Reflection of Microwave Atomic Force Microscopy

A novel electrochemical atomic force microscope and its applications

Localized Electrochemical Impedance Measurements on Nafion Membranes: Observation and Analysis of Spatially Diverse Proton Transport Using Atomic Force Microscopy.

A Novel Atomic Force Microscope Operating in Liquid for in Situ Investigation of Electrochemical Preparation of Porous Alumina.

A Novel Atomic Force Microscope Operating in Liquid with Open Probe Unit and Optimized Laser Tracking System

Quantitative Measurement of Local Conductivity of SnO2 Nanobelt Field Effect Transistor Utilizing Microwave Atomic Force Microscopy

T0401-2-1 Development of a Microwave AFM Probe for the Evaluation of Electrical Properties

T0301-2-5 Modifying the Structure of Microwave AFM Probe for Improving the Sensitivity in the Measurement of Electrical Properties

Method for Accurate Measurement of Micro-Nano Thin Film Device Resistivity

Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave Afm Probe