Abstract:The field of local conductivity measurement has produced many kinds of scanning probes to measure the electricalcharacteristics at the nanoscale. However, due to the design limitations, no appropriate probe has been developed to measureand simultaneously image the electrical characteristics at 100 nm order. This research aims to fabricate a four-pOint AFMprobe in order to image electrical characteristics at 100 nm ord Four-point atomic force microscope probe for imaging the electrical characteristics of materials Lin ZHANG", Yang JU*2 and Atsushi HOSOI*2 *1Nagoya Univ. Dept. of Mechanical science and Engineering Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan The field of local conductivity measurement has produced many kinds of scanning probes to measure the electrical characteristics at the nanoscale. However, due to the design limitations, no appropriate probe has been developed to measure and simultaneously image the electrical characteristics at 100 nm order. This research aims to fabricate a four-point AFM probe in order to image electrical characteristics at 100 nm order. Specifically, a certain tape of AFM probe for cell measurement e.g . Biolever, can be etched into four independent electrodes with an in-between space of 200 nm. The four electrodes are basically used to measure the electrical potential drop by allowing the electric current to pass through. The four-point probe is then integrated into a multimode AFM to realize the scanning and imaging simultaneously. The present experimental results show that the four-point probe fabricated can be used to image the surface topography of the Au nanowire, thereby permitting the simultaneous measurements of surface profiles and electrical characteristics of the samples at the next stage.

T0401-2-1 Development of a Microwave AFM Probe for the Evaluation of Electrical Properties

J0610104 Evaluation of Interatomic Force on the Tip of Probe by Using Microwave Atomic Force Microscope

T0301-2-5 Modifying the Structure of Microwave AFM Probe for Improving the Sensitivity in the Measurement of Electrical Properties

Properties of M-AFM Probe Affected by Nanostructural Metal Coatings

Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave Afm Probe

446 Development of a Microwave AFM Probe Based on GaAs

A Microwave Probe Nanostructure for Atomic Force Microscopy

Microwave Atomic Force Microscopy Imaging for Nanometer-Scale Electrical Property Characterization.

Microwave Atomic Force Microscopy: Quantitative Measurement and Characterization of Electrical Properties on the Nanometer Scale

Development of a Nanostructural Microwave Probe Based on GaAs

Structure Modification of M-AFM Probe for the Measurement of Local Conductivity

Fabrication Of A Gaas Microwave Probe Used For Atomic Force Microscope

OS1508 Investigation of Interatomic Force under the Tip of Microwave-AFM Probe

J212015 Quantitative Evaluation of Conductivity of Metallic Nanowires by Microwave Atomic Force Microscopy

Measurement of electrical properties of materials under the oxide layer by microwave-AFM probe

Optimization Of The Tip Of Microwave Afm Probe

Influence of Material Surface on the Measurement of Local Electrical Conductivity Using Microwave Atomic Force Microscopy

A Nanostructual Microwave Probe Used for Atomic Force Microscope

G030083 Four-point Atomic Force Microscope Probe for Imaging the Electrica1 Characteristics of Materials

High Quality-Factor Quartz Tuning Fork Glass Probe Used In Tapping Mode Atomic Force Microscopy For Surface Profile Measurement

Development of a New Microscopic Four-Point AFM Probe for the Measurement of Local Electrical Conductivity