Study on the properties of gallium antimonide surface passivatied with S2Cl2 solution

Fang Chen,Guojun Liu,Zhipeng Wei,Rui Deng,Xuan Fang,Shanshan Tian,Yonggang Zou,Mei Li,Xiaohui Ma
DOI: https://doi.org/10.1109/ICoOM.2012.6316206
2012-01-01
Abstract:The surface optical and chemical properties of gallium antimonide (GaSb) surfaces after dichloride disulfide (S2Cl2) and ammonium sulfide ((NH4)2S) treatments were compared. Photoluminescence (PL) spectroscopy is used to study the GaSb surfaces passivated by S2Cl2 comparing to (NH4)2S solution, meanwhile, quantitative comparison using x-ray photoelectron spectroscopy (XPS) demonstrates that S2Cl2 passivation dramatically improves the stability against reoxidation in air compared with the (NH4)2S solution. We found that S2Cl2 method is quite effective for removing oxides of GaSb surface, besides, PL intensity of S2Cl2-passivated sample was higher than (NH4)2S-passivated sample, and stability of S2Cl2-passivated sample was also more sustained. Overall, S2Cl2 provides to be superior passivation for III-V compound semiconductor material promising for high-speed and optoelectronic device applications.
What problem does this paper attempt to address?