Interface Investigation on SiGe/Si Multilayer Structures: Influence of Different Epitaxial Process Conditions
Zhenzhen Kong,Yanpeng Song,Hailing Wang,Xiaomeng Liu,Xiangsheng Wang,Jinbiao Liu,Ben Li,Jiale Su,Xinguang Tan,Qingjie Luan,Hongxiao Lin,Yuhui Ren,Yiwen Zhang,Jingxiong Liu,Junfeng Li,Anyan Du,Henry H. Radamson,Chao Zhao,Tianchun Ye,Guilei Wang
DOI: https://doi.org/10.1021/acsami.3c14168
IF: 9.5
2023-11-22
ACS Applied Materials & Interfaces
Abstract:SiGe/Si multilayer is the core structure of the active area of gate-all-around field-effect transistors and semiconductor quantum computing devices. In this paper, high-quality SiGe/Si multilayers have been grown by a reduced-pressure chemical vapor deposition system. The effects of temperature, pressure, interface processing (dichlorosilane (SiH(2)Cl(2), DCS) and hydrogen chloride (HCl)) on improving the transition thickness of SiGe to Si interfaces were investigated. The interface quality was...
materials science, multidisciplinary,nanoscience & nanotechnology