A Self-Rectifying $\hbox{hfo}_{x}$ -Based Unipolar RRAM with NiSi Electrode

X. A. Tran,W. G. Zhu,B. Gao,J. F. Kang,W. J. Liu,Z. Fang,Z. R. Wang,Y. C. Yeo,B. Y. Nguyen,M. F. Li,H. Y. Yu
DOI: https://doi.org/10.1109/led.2011.2181971
IF: 4.8157
2012-01-01
IEEE Electron Device Letters
Abstract:In this letter, a unipolar resistive switching random access memory (RAM) based on NiSi/HfOx/TiN structure is demonstrated, which is compatible with NiSi S/D in advance CMOS technology process. Highlights of the demonstrated resistive RAM include the following: 1) CMOS-technology-friendly materials and process; 2) excellent self-rectifying behavior in low-resistance state (> 10(3) at 1 V); 3) well-behaved memory performance, such as high on/off resistance ratio (> 10(2)) and good retention characteristics (> 10(5) s at 125 degrees C); and 4) wide readout margin for high-density cross-point memory devices (number of word lines > 10(6) for the worst case condition).
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