Real time characterization of surface roughness of YBCOHTS film under thin H3PO4 layer

Liu Juanxiu,Luo Zhengxiang,Yang Kai,Liu Lin,Bu Shirong,Zhang Tianliang,Ye Yutang
DOI: https://doi.org/10.3321/j.issn:1002-185x.2007.11.016
2007-01-01
Rare Metal Materials and Engineering
Abstract:A real time monitoring system based on infrared technique has been designed to get the infrared grey-scale distribution of thin etchant layer over YBCO HTS (high temperature superconductor) film and to characterize the variation of YBCO surface roughness using normalized grey-scale standard deviation based on the thermal exchange model of liquid film. Theoretical analysis and experimental results show that the three stages of YBCO surface roughness, i.e., increasing, decreasing and going smooth, can be clearly described, as well as the corresponding time of every stage can be directly obtained from the normalized curve of grey-scale standard deviation. In the conditions mentioned in this study, the maximal value of surface roughness appears at 8 s, then gradually falls, and turns to be stable from 40 s. It is an important stage's aim to observe the YBCO surface roughness under thin etchant layer successfully, and to establish a favorable basis for the difficult real time monitoring of wet etching process of YBCO HTS film.
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