Current and infrared characteristics in laser assisted chemical etching process of YBCO film

Kai YANG,Juan-xiu LIU,Lin LIU,Yu-tang YE,Shi-rong BU,Zheng-xiang LUO
DOI: https://doi.org/10.3969/j.issn.1003-501X.2007.03.028
2007-01-01
Abstract:A real time monitoring system based on circuit and infrared technique was designed to research the current and infrared characteristics in laser assisted chemical etching process of yttrium barium copper oxygen (YBCO) high temperature superconducting film. The important experimental results were provided to control laser power, etchant solution, etching period and temperature. The major discoveries include: large initial etching current and stable current increase as well as steep-drop points were observed in laser assisted chemical etching process, and the possible reasons were analyzed by comparing the etching current without laser radiation, too; The infrared thermo-images of etchant solution were observed to find that the etching speed was accelerated by laser radiation, which was caused by laser-chemical effect and the increased temperature of etchant solution.
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