The Effect Of Laser Energy Density And Target-Substrate Distance On The Quality Of Ybalcu3o7-X Thin-Films

Shifa Xu,Yongjun Tian,Huibin L��,Dafu Cui,Zhenghao Chen,Lieming Li,Guozhen Yang
DOI: https://doi.org/10.1088/0953-2048/7/6/017
1994-01-01
Abstract:We have systematically investigated the effect of laser energy density (E) and target-substrate distance (D) on the quality of high-temperature superconducting YBa2Cu3O7-x (YBCO) thin films grown by pulsed laser deposition. It was shown that for the preparation of high-quality YBCO thin films there exists an optimal substrate-target distance for each laser energy density. By using a blast-shock wave model we obtained an E-D phase diagram (E-E(th))D-2 = constant which gives an optimal choice between the substrate-target distance and laser energy density.
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