Use of real-time Fourier Transform Infrared Reflectivity as an in situ monitor of YBCO film growth and processing

Gertjan Koster,Jeong-Uk Huh,R.H. Hammond,M.R. Beasley
DOI: https://doi.org/10.1063/1.2753118
2007-01-19
Abstract:Fourier Transform Infrared (FTIR) spectroscopy has been utilized during high rate E-beam evaporation/deposition of YBa2Cu3O7 (YBCO). The results demonstrate the great utility of FTIR as an in situ monitor of YBCO deposition and processing. We detect different (amorphous/fine polycrystalline) insulating pre-existing phases to the high Tc superconducting phase which appear to have distinct reflectivity fingerprints dominated by thin film interference effects, as a function of temperature and oxygen pressure. These fingerprints reveal some of the kinetic and thermodynamic pathways during the growth of YBCO.
Materials Science,Superconductivity
What problem does this paper attempt to address?
The problem that this paper attempts to solve is how to use real - time Fourier Transform Infrared Reflectivity (RT - FTIR) as an in - situ monitoring tool during the growth of YBa₂Cu₃O₇ (YBCO) thin films. Specifically, the authors are concerned with whether RT - FTIR can effectively monitor the growth of YBCO thin films and the phase - change situations during their post - treatment in the high - rate electron - beam evaporation/deposition process. Through this method, researchers hope to better understand the growth kinetics and thermodynamic paths of YBCO thin films under different temperature and oxygen pressure conditions, as well as the influence of these changes on the film properties. The paper mentions that with the development of complex oxide thin - film technology, the demand for effective in - situ characterization and monitoring methods is also increasing. In particular, research in the field of high - temperature superconducting materials and their applications has driven the growth of this demand. The authors show that FTIR, as a new and effective tool, can be used to monitor the absolute temperature of the thin film and the changes in its dielectric - optical properties during the deposition of high - temperature superconducting YBCO thin films. These changes in properties can help monitor the transition and transformation phenomena during film deposition and subsequent processing. By using RT - FTIR technology, researchers can observe the unique reflectivity fingerprints of the transformation from different (amorphous/fine polycrystalline) insulating pre - existing phases to the high - temperature superconducting phase. These fingerprints are mainly determined by the film interference effect and change with temperature and oxygen pressure. This reveals some of the kinetic and thermodynamic paths during the growth of YBCO, providing important information for controlling and optimizing the growth of YBCO thin films.