Vaporization of a mixed precursor in chemical vapor deposition of YBCO films

Gang Zhou,Guangyao Meng,Roger L. Schneider,Bimal K. Sarma,Moises Levy
DOI: https://doi.org/10.1007/BF00730402
1995-01-01
Journal of Superconductivity
Abstract:Single-phase YBa2Cu3O7-d thin films withTc values around 90 K are readily obtained by using a single-source chemical vapor deposition technique with normal precursor mass transport. The quality of the films is controlled by adjusting the carrier gas flow rate and the precursor feed rate.
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